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Deposition of Highly Porous Nanocrystalline Platinum on Functionalized Substrates Through Fluorine-Induced Decomposition of Pt(PF3)4Adsorbates

Particle & Particle Systems Characterization, Volume 30, Issue 8, pages 672–677, 2013.

Steven J. Randolph, Aurelien Botman, Milos Toth.

FEI Company, Hillsboro, USA and

School of Physics and Advanced Materials University of Technology, Sydney, Broadway, Australia.

Abstract

Nanocrystalline platinum is synthesized at room temperature by co-injecting Pt(PF₃)₄ and XeF₂vapors onto solid supports in vacuum. The Pt nucleation time scales with chemisorbed fluorine coverage, which is controlled by pre-dosing supports with XeF₂, and by optional electron or ion beam irradiation under flowing XeF₂. The latter is used to increase the chemisorbed fluorine coverage and localize the Pt growth process.

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