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Sensors and Actuators A: Physical, Volume 203, 1 December 2013, Pages 300-303.
D.K. Maurya, A. Sardarinejad, K. Alameh.
Electron Science Research Institute, Edith Cowan University, Joondalup, WA 6027, Australia.
Abstract
We demonstrate the feasibility of developing a low-cost, rugged, miniaturized ruthenium oxide (RuO2) thin-film pH sensor comprising a ruthenium oxide on platinum sensing electrode deposited using R.F. magnetron sputtered in conjunction with an integrated thick Ag/AgCl reference electrode. A ruthenium oxide thin-film (300 nm) is deposited on an alumina substrate using R. F. magnetron sputtering with a ruthenium oxide sputtering target in Argon plasma. Experimental results show a linear pH sensitivity of 58.50 mV/pH when the developed sensor is immersed in a standard buffer solution having pH values of 4.0 and 10.0 and lab supply water of pH 7.7 at a temperature of 22 °C. These results are in excellent agreement with the theoretical Nernstian response of 58.56 mV/pH at 22 °C.
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E-mail: [email protected] (D. K. Maurya)
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