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Significance Statement
“The wide angle scanner is created using Silicon integrated Micro Optical Systems Technology (SiMOST™) developed by Si-Ware Systems(SWS). SiMOST is a complete platform that enables the design, validation, and fabrication of monolithic optical systems on a single silicon chip. Capitalizing on MEMS fabrication technologies, SWS has developed a library of optical MEMS components with validated and proven performance to obtain highly robust, monolithic micro-scaled optical benches. The SiMOST chips are interfaced by SWS’ in-house Application Specific Integrated Circuit (ASIC) solutions.”
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Journal Reference
Opt Express. 2013, 21(12):13906-16.
Sabry YM, Khalil D, Saadany B, Bourouina T.
Université Paris-Est, Laboratoire ESYCOM, ESIEE Paris, Cité Descartes, F-93162 Noisy-le-Grand Cedex, France. [email protected]
Abstract
A wide angle microscanning architecture is presented in which the angular deflection is achieved by displacing the principle axis of a curved silicon micromirror of acylindrical shape, with respect to the incident beam optical axis. The micromirror curvature is designed to overcome the possible deformation of the scanned beam spot size during scanning. In the presented architecture, the optical axis of the beam lays in-plane with respect to the substrate opening the door for a completely integrated and self-aligned miniaturized scanner. A micro-optical bench scanning device, based on translating a 200 um focal length micromirror by an electrostatic comb-drive actuator, is implemented on a silicon chip. The microelectromechanical system has a resonance frequency of 329 Hz and a quality factor of 22. A single-mode optical fiber is used as the optical source and inserted into a micromachined groove fabricated and lithographically aligned with the microbench. Optical deflection angles up to 110 degrees are demonstrated.
