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H.Q. Hoang, M. Osterberg, A. Khursheed
Ultramicroscopy, Volume 111, Issue 8, July 2011
Abstract
This paper presents a high signal-to-noise ratio electron energy spectrometer attachment for the scanning electron microscope (SEM), designed to measure changes in specimen surface potential from secondary electrons and extract specimen atomic number information from backscattered electrons. Experimental results are presented, which demonstrate that the spectrometer can in principle detect specimen voltage changes well into the sub-mV range, and distinguish close atomic numbers by a signal-to-noise ratio of better than 20. The spectrometer has applications for quantitatively mapping specimen surface voltage and atomic number variations on the nano-scale.
Additional information:
Anjam Khursheed, Hung Q. Hoang, Avinash Srinivasan. A wide-range Parallel Radial Mirror Analyzer for scanning electron/ion Microscopes. Journal of Electron Spectroscopy and Related Phenomena 184 (2012) 525– 532
Hung QuangHoang n, AnjamKhursheed . A radial mirror analyzer for scanning electron/ion microscopes.
Nuclear Instruments and Methods in Physics Research A 635 (2011) 64–68
Anjam Khursheed. Design of a parallel magnetic box energy analyzer attachment for electron Microscopes.
Journal of Electron Spectroscopy and Related Phenomena 184 (2011) 57–61.
The US patent for the Toroidal Spectrometer (Electrostatic electron spectrometry apparatus, US 8,013,298 B2) was published 6th September, 2011.
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