A multiple-state micro-mechanical programmable memory

Rafmag Cabrera, Emmanuelle Merced, Noraica Dávila, Félix E. Fernández, Nelson Sepúlveda
Microelectronic Engineering, Volume 88, Issue 11, November 2011

Abstract

This paper reports a multiple-state micro-mechanical memory. The tip displacements of a 350 μm long VO2-coated micro-mechanical silicon cantilever were programmed to absolute displacements ranging from −19 to −7 m. Ten non-uniform mechanical states were programmed using controlled linearly increasing laser pulses. The uniformity of the mechanical states was improved by using non-linearly increasing laser pulses. The programmed states are reset by driving the VO2 outside the hysteretic region.

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