Comprehensive study of graphene grown by chemical vapor deposition

Journal of Materials Science: Materials in Electronics, October 2014, Volume 25, Issue 10, pp 4333-4338.

Jincheng Fan, Tengfei Li, Yuanhong Gao, Jianguo Wang, Hanlin Ding, Hang Heng.

  1. School of Materials Science and Engineering, Anhui University of Technology, Maanshan, 243002, China and
  2. Center for Analysis and Testing and Department of Physics, Nanjing Normal University, Nanjing, 210097, China.

 

Abstract

 

Graphene was grown on Cu foil by chemical vapor deposition with CH4 as carbon source, and then was transferred onto various substrates for device applications. The structural and optical properties of graphene were investigated, comprehensively. Raman spectra indicate as-grown and transferred graphene films are homogenous monolayer graphene. Optical microscopy and scanning electron microscopy images reveal wrinkle-free and smooth surface of transferred graphene, confirming the high quality of graphene. In addition, the transferred graphene on glass exhibits excellent transmittances in the visible region (89.3 % at ~500 nm). Therefore, the results present the controllable approaches to achieve as-grown and transferred high quality graphene for the fabrication of multiple nanoelectronic devices.

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Significance Statement

 

The authors presented the controllable approaches to achieve as-grown and transferred high quality graphene for the fabrication of multiple nanoelectronic devices, which may have significant impact on the future nanoelectronics.

 

 

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