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Sensors and Actuators A: Physical, Available online 23 October 2013.
Lin Liu, Erkang Wang, Xiaoyang Zhang, Wenxuan Liang, Xingde Li, Huikai Xie.
Department of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611, United States and
Department of Biomedical Engineering, Johns Hopkins University, Baltimore, MD 21205, United States.
Abstract
A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ±26° with a 2D MEMS scanning micromirror and a depth scan of over 400 um with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 um and 7.0 um, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.
