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Optics Express, Vol. 21, Issue 9, pp. 10886-10896 (2013).
John Covey and Ray T. Chen.
The University of Texas at Austin, 10100 Burnet Road Bldg. 160 MER, Austin, Texas 78758, USA.
Abstract
Horizontal multiple slot waveguides of polysilicon and silicon nanocrystalline oxide were grating coupled to a surface normal fiber array. Measurements yielded a coupling efficiency of 60% per grating. The fabrication-tolerant, four-stage grating design was genetically evolved from a random seed without starting from first-principle design. Theoretical coupling efficiency was 68% and was re-designed to 63% after accommodating all sources of fabrication error. To our knowledge, this is the first implementation of a purely polysilicon and silicon nanocrystalline oxide slot waveguide platform.
© 2013 OSA
