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Micro and Nano Systems Letters 2013, 1:7.
Jongcheol Park , Jae Yeong Park.
Department of Electronic Engineering, Kwangwoon University, 447-1 Wolgye-dong, Nowon-gu, Seoul 139-701, Republic of Korea.
Abstract
A piezoelectrically actuated corner cube retroreflector (CCR) has been investigated for free space optical communications. The proposed CCR consisted of two mutually orthogonal bulk-micromachined mirror assembled with piezoelectrically actuated horizontal mirror. The vertical mirrors were fabricated by using anisotropic wet-etching of double silicon-on-insulator (SOI) wafer and horizontal mirror was supported by two stress-compensating and one actuating lead zirconate titanate (PZT) micro-cantilevers. The fabricated CCRs exhibited angular displacement of 1.87° at 5 volts and switching times of 276 µs. It also exhibited a good cut-off frequency of 2.5 kHz which can be digitally modulated up to about 5 kb/s.
